HO

Hiroya Ohta

HI Hitachi: 1 patents #856 of 3,149Top 30%
Overall (1994): #124,823 of 165,921Top 80%
1
Patents 1994

Issued Patents 1994

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5326979 Electron beam lithography system Katsuhiro Kawasaki, Takashi Matsuzaka, Toshihiko Kohno 1994-07-05