Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5352656 | Method for the chemical vapor deposition of group IB and group VIIIB metal barrier layers | Walter J. Lackey, John A. Hanigofsky, Michael J. Shapiro, E. Kent Barefield, William B. Carter | 1994-10-04 |