Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5312783 | Process for the preparation of a high dielectric thin film using ECR plasma CVD | Satoshi Nakai | 1994-05-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5312783 | Process for the preparation of a high dielectric thin film using ECR plasma CVD | Satoshi Nakai | 1994-05-17 |