Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5377007 | Interferometric surface inspection machine designed to support an element on the side to be inspected | Kenji Yasuda, Shigenori Ohi, Kenichi Noguchi | 1994-12-27 |
| 5299049 | Beam shifting device | Takayuki Saito | 1994-03-29 |