Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5308741 | Lithographic method using double exposure techniques, mask position shifting and light phase shifting | — | 1994-05-03 |
| 5292623 | Method for forming integrated circuit devices using a phase shifting mask | Bernard J. Roman | 1994-03-08 |