HF

Heinrich Friedhelm

Fraunhofer: 1 patents #1 of 29Top 4%
Overall (1994): #127,619 of 165,921Top 80%
1
Patents 1994

Issued Patents 1994

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5319197 Process for monitoring ion-assisted processing procedures on wafers and an apparatus for carrying out the same 1994-06-07