Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5344542 | Multiple-processing and contamination-free plasma etching system | Joseph A. Maher, E. John Vowles, Arthur W. Zafiropoulo, Mark William Miller | 1994-09-06 |
| 5308431 | System providing multiple processing of substrates | Joseph A. Maher, E. John Vowles, Arthur W. Zafiropoulo, Mark William Miller | 1994-05-03 |