Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5374315 | Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment | Albert E. Ozias | 1994-12-20 |
| 5318634 | Substrate supporting apparatus | Albert E. Ozias | 1994-06-07 |