Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5288333 | Wafer cleaning method and apparatus therefore | Masato Tanaka, Nobuyuki Hirai, Kaoru Shinbara, Hitoshi Yoshioka | 1994-02-22 |
| 5275184 | Apparatus and system for treating surface of a wafer by dipping the same in a treatment solution and a gate device for chemical agent used in the apparatus and the system | Yoshio Nomura, Hiroyuki Araki | 1994-01-04 |