Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5315212 | Plasma processing apparatus for generating uniform strip-shaped plasma by propagating microwave through rectangular slit | Akira Ishii, Syoichiro Minomo, Michio Taniguchi | 1994-05-24 |