Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5375033 | Multi-dimensional precision micro-actuator | — | 1994-12-20 |
| 5363021 | Massively parallel array cathode | — | 1994-11-08 |
| 5316979 | RIE process for fabricating submicron, silicon electromechanical structures | Zuoying L. Zhang | 1994-05-31 |
| 5287082 | Submicron isolated, released resistor structure | Susanne Arney, Jun Yao | 1994-02-15 |