Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5345170 | Wafer probe station having integrated guarding, Kelvin connection and shielding systems | Warren K. Harwood, Paul A. Tervo, Kenneth R. Smith, Richard H. Warner, Peter Andrews | 1994-09-06 |