Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5364518 | Magnetron cathode for a rotating target | Anton Dietrich, Joachim Szczyrbowski | 1994-11-15 |
| 5340454 | Method and apparatus for the coating of substrates | Christian Schaefer | 1994-08-23 |