Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5338580 | Method of preparation of functional deposited film by microwave plasma chemical vapor deposition | Hiroyuki Katagiri, Tetsuya Takei | 1994-08-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5338580 | Method of preparation of functional deposited film by microwave plasma chemical vapor deposition | Hiroyuki Katagiri, Tetsuya Takei | 1994-08-16 |