Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5322568 | Apparatus for forming deposited film | Jun-Ichi Hanna, Isamu Shimizu, Masaaki Hirooka | 1994-06-21 |
| 5288658 | Process for the formation of an amorphous silicon deposited film with intermittent irradiation of inert gas plasma | — | 1994-02-22 |