Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5374332 | Method for etching silicon compound film and process for forming article by utilizing the method | Shuji Koyama, Masami Kasamoto | 1994-12-20 |
| 5347713 | Method for manufacturing ink jet head | Yukio Kawajiri, Shuji Koyama, Manabu Sueoka, Toshio Suzuki, Hisashi Yamamoto +1 more | 1994-09-20 |