Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5328583 | Sputtering apparatus and process for forming lamination film employing the apparatus | Kenji Ando | 1994-07-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5328583 | Sputtering apparatus and process for forming lamination film employing the apparatus | Kenji Ando | 1994-07-12 |