Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5365342 | Alignment and exposure apparatus and method for manufacture of integrated circuits | Naoki Ayata, Mitsugu Yamamura, Masao Kosugi, Kazuo Takahashi, Mitsuaki Seki | 1994-11-15 |