Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5348723 | Synthesis of semiconductor grade tungsten hexafluoride | Bruce J. Sabacky | 1994-09-20 |
| 5328668 | Synthesis of semiconductor grade tungsten hexafluoride | Bruce J. Sabacky | 1994-07-12 |
| 5324498 | Purification of tungsten hexafluoride | Barry J. Streusand, Don A. Almond | 1994-06-28 |