Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5334541 | Method of fabricating an integrated circuit with lines of critical width extending in the astigmatically preferred direction of the lithographic tool | Thomas E. Adams, Kuo-Hua Lee, Janmye Sung | 1994-08-02 |