Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5316879 | Sub-micron device fabrication using multiple aperture filter | Steven Berger | 1994-05-31 |
| 5279925 | Projection electron lithographic procedure | Steven Berger | 1994-01-18 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5316879 | Sub-micron device fabrication using multiple aperture filter | Steven Berger | 1994-05-31 |
| 5279925 | Projection electron lithographic procedure | Steven Berger | 1994-01-18 |