Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5360980 | Structure and method for providing a gas purge for a vacuum particle sensor installed in a corrosive or coating environment | Hoang K. Nguyen, Earl J. Carrasco | 1994-11-01 |
| 5347138 | In situ real time particle monitor for a sputter coater chamber | Derek Aqui | 1994-09-13 |