Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5354417 | Etching MoSi.sub.2 using SF.sub.6, HBr and O.sub.2 | Ernest Cheung | 1994-10-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5354417 | Etching MoSi.sub.2 using SF.sub.6, HBr and O.sub.2 | Ernest Cheung | 1994-10-11 |