Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5338398 | Tungsten silicide etch process selective to photoresist and oxide | Robert Lum, Thierry Fried | 1994-08-16 |
| 5296093 | Process for removal of residues remaining after etching polysilicon layer in formation of integrated circuit structure | Ian Latchford, Isamu Namose, Kazumi Tsuchida | 1994-03-22 |