Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5366002 | Apparatus and method to ensure heat transfer to and from an entire substrate during semiconductor processing | — | 1994-11-22 |
| 5362372 | Self cleaning collimator | — | 1994-11-08 |
| 5320728 | Planar magnetron sputtering source producing improved coating thickness uniformity, step coverage and step coverage uniformity | — | 1994-06-14 |