Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5345824 | Monolithic accelerometer | Steven J. Sherman, A. Paul Brokaw, Robert W. K. Tsang | 1994-09-13 |
| 5326726 | Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure | Robert W. K. Tsang | 1994-07-05 |
| 5314572 | Method for fabricating microstructures | Roger T. Howe | 1994-05-24 |