Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5322712 | Process for improved quality of CVD copper films | John Anthony Thomas Norman, David A. Roberts | 1994-06-21 |
| 5298075 | Furnace tube cleaning process | Andre Lagendijk, David A. Roberts | 1994-03-29 |
| 5288662 | Low ozone depleting organic chlorides for use during silicon oxidation and furnace tube cleaning | Andre Lagendijk, David A. Roberts | 1994-02-22 |