Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4886954 | Hot wall diffusion furnace and method for operating the furnace | Chorng-Tao Yu, Alan Emami | 1989-12-12 |
| 4817557 | Process and apparatus for low pressure chemical vapor deposition of refractory metal | Michael Diem, Jon C. Goldman | 1989-04-04 |