Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4817557 | Process and apparatus for low pressure chemical vapor deposition of refractory metal | Michael Diem, Michael A. Fisk | 1989-04-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4817557 | Process and apparatus for low pressure chemical vapor deposition of refractory metal | Michael Diem, Michael A. Fisk | 1989-04-04 |