Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4861729 | Method of doping impurities into sidewall of trench by use of plasma source | Genshu Fuse, Takashi Hirao | 1989-08-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4861729 | Method of doping impurities into sidewall of trench by use of plasma source | Genshu Fuse, Takashi Hirao | 1989-08-29 |