Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4800174 | Method for producing an amorphous silicon semiconductor device using a multichamber PECVD apparatus | Masatoshi Kitagawa, Takashi Hirao | 1989-01-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4800174 | Method for producing an amorphous silicon semiconductor device using a multichamber PECVD apparatus | Masatoshi Kitagawa, Takashi Hirao | 1989-01-24 |