Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4859908 | Plasma processing apparatus for large area ion irradiation | Kentaro Setsune, Takashi Hirao | 1989-08-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4859908 | Plasma processing apparatus for large area ion irradiation | Kentaro Setsune, Takashi Hirao | 1989-08-22 |