Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4808259 | Plasma etching process for MOS circuit pregate etching utiliizing a multi-step power reduction recipe | Gerald Yin, Glen Wada | 1989-02-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4808259 | Plasma etching process for MOS circuit pregate etching utiliizing a multi-step power reduction recipe | Gerald Yin, Glen Wada | 1989-02-28 |