Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4871421 | Split-phase driver for plasma etch system | John S. Ogle | 1989-10-03 |
| 4808259 | Plasma etching process for MOS circuit pregate etching utiliizing a multi-step power reduction recipe | Don W. Jillie, Jr., Glen Wada | 1989-02-28 |