Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4883020 | Apparatus of metal organic chemical vapor deposition for growing epitaxial layer of compound semiconductor | Kazumi Kasai, Hitoshi Tanaka, Tatsuya Oh-hori, Junji Komeno | 1989-11-28 |
| 4839196 | Photochemical film-forming method | — | 1989-06-13 |