Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4883020 | Apparatus of metal organic chemical vapor deposition for growing epitaxial layer of compound semiconductor | Kazumi Kasai, Hiromi Itoh, Hitoshi Tanaka, Tatsuya Oh-hori | 1989-11-28 |