Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4878995 | Method of dry etching and apparatus for use in such method | Makoto Sekine, Haruo Okano, Yasuhiro Horiike | 1989-11-07 |
| 4838978 | Dry etching apparatus | Makoto Sekine, Haruo Okano, Yasuhiro Horiike | 1989-06-13 |