Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4878995 | Method of dry etching and apparatus for use in such method | Tsunetoshi Arikado, Haruo Okano, Yasuhiro Horiike | 1989-11-07 |
| 4844774 | Phototreating method and apparatus therefor | Haruo Okano, Yasuhiro Horiike | 1989-07-04 |
| 4838978 | Dry etching apparatus | Haruo Okano, Tsunetoshi Arikado, Yasuhiro Horiike | 1989-06-13 |