Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4890029 | Electron beam apparatus including plurality of ion pump blocks | Katsuya Okumura | 1989-12-26 |
| 4807159 | Apparatus and method for controlling irradiation of an electron beam at a fixed position in an electron beam tester system | Fumio Komatsu, Katsuya Okumura | 1989-02-21 |
| 4800268 | Method and apparatus for scanning a laser beam to examine the surface of semiconductor wafer | Katsuya Okumura, Shigeru Ogawa | 1989-01-24 |