Issued Patents 1989
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4890029 | Electron beam apparatus including plurality of ion pump blocks | Motosuke Miyoshi | 1989-12-26 |
| 4875088 | Semiconductor device having a backplate electrode | Hidemitsu Egawa, Riichirou Aoki | 1989-10-17 |
| 4823182 | Semiconductor device with a diffusion barrier contact of a refractory metal nitride and either carbon or boron | — | 1989-04-18 |
| 4807021 | Semiconductor device having stacking structure | — | 1989-02-21 |
| 4807159 | Apparatus and method for controlling irradiation of an electron beam at a fixed position in an electron beam tester system | Fumio Komatsu, Motosuke Miyoshi | 1989-02-21 |
| 4800268 | Method and apparatus for scanning a laser beam to examine the surface of semiconductor wafer | Motosuke Miyoshi, Shigeru Ogawa | 1989-01-24 |