Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4797178 | Plasma etch enhancement with large mass inert gas | Vu Q. Bui, Joseph G. Hoffarth, Vicki J. Malueg | 1989-01-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4797178 | Plasma etch enhancement with large mass inert gas | Vu Q. Bui, Joseph G. Hoffarth, Vicki J. Malueg | 1989-01-10 |