Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4852133 | X-ray lithography apparatus | Minoru Ikeda, Ryuichi Funatsu, Motoya Taniguchi | 1989-07-25 |
| 4825453 | X-ray exposure apparatus | Yoshihiro Komeyama, Minoru Ikeda, Akira Inagaki | 1989-04-25 |
| 4803712 | X-ray exposure system | Minoru Ikeda, Motoya Taniguchi | 1989-02-07 |