Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4852133 | X-ray lithography apparatus | Minoru Ikeda, Ryuichi Funatsu, Yukio Kembo | 1989-07-25 |
| 4803712 | X-ray exposure system | Yukio Kembo, Minoru Ikeda | 1989-02-07 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4852133 | X-ray lithography apparatus | Minoru Ikeda, Ryuichi Funatsu, Yukio Kembo | 1989-07-25 |
| 4803712 | X-ray exposure system | Yukio Kembo, Minoru Ikeda | 1989-02-07 |