Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4865709 | Magnetron sputter apparatus and method for forming films by using the same apparatus | Yukio Nakagawa, Ken-ichi Natsui, Tadashi Sato, Eiji Setoyama, Mitsuhiro Kamei | 1989-09-12 |
| 4864286 | Switch operation monitoring apparatus | Akira Hashimoto, Masanori Tsukushi, Yukio Kurosawa, Kiyoshi Okumura | 1989-09-05 |