Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4865709 | Magnetron sputter apparatus and method for forming films by using the same apparatus | Yukio Nakagawa, Ken-ichi Natsui, Youichi Ohshita, Tadashi Sato, Eiji Setoyama | 1989-09-12 |