Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE33129 | Vacuum pump | Mashiro Mase, Yoshitsugu Tsutsumi, Minoru Taniyama, Makoto Terajima | 1989-12-12 |
| 4835114 | Method for LPCVD of semiconductors using oil free vacuum pumps | Akihiko Satou, Tadao Kusaka, Shigeo Tomiyama, Kouzi Aoki, Ichiro Gyobu +4 more | 1989-05-30 |