Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4835114 | Method for LPCVD of semiconductors using oil free vacuum pumps | Akihiko Satou, Shigeo Tomiyama, Kouzi Aoki, Ichiro Gyobu, Kimio Muramatsu +4 more | 1989-05-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4835114 | Method for LPCVD of semiconductors using oil free vacuum pumps | Akihiko Satou, Shigeo Tomiyama, Kouzi Aoki, Ichiro Gyobu, Kimio Muramatsu +4 more | 1989-05-30 |