Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4853640 | Synchrotron radiation source | Manabu Matsumoto, Takashi Ikeguchi, Tadasi Sonobe, Toru Murashita, Satoshi Ido +4 more | 1989-08-01 |
| 4835114 | Method for LPCVD of semiconductors using oil free vacuum pumps | Akihiko Satou, Tadao Kusaka, Shigeo Tomiyama, Kouzi Aoki, Ichiro Gyobu +4 more | 1989-05-30 |