Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4824309 | Vacuum processing unit and apparatus | Yutaka Kakehi, Norio Nakazato, Yoshimasa Fukushima, Fumio Shibata, Tsunehiko Tsubone | 1989-04-25 |
| 4810473 | Molecular beam epitaxy apparatus | Naoyuki Tamura, Hideaki Kamohara, Kazuaki Ichihashi | 1989-03-07 |