FS

Fumio Shibata

HI Hitachi: 1 patents #814 of 2,935Top 30%
Overall (1989): #113,527 of 140,708Top 85%
1
Patents 1989

Issued Patents 1989

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
4824309 Vacuum processing unit and apparatus Yutaka Kakehi, Norio Nakazato, Yoshimasa Fukushima, Tsunehiko Tsubone, Norio Kanai 1989-04-25